Systems and methods for MEMS-based cross-point electrical switching

An electrical cross-point switch system, comprising:

• a first die comprising N inputs, each at least 10 Gbps, electrically connected to input transmission lines, M outputs, each at least 10 Gbps, electrically connected to output transmission lines, and at least two Radio Frequency (RF) Microelectromechanical systems (MEMS) switches selectively and electrically interconnecting each input transmission line and each output transmission line;
• a second die comprising control and addressing circuitry configured to selectively control interconnection of each input transmission line and each output transmission line via the at least two RF MEMS switches;
• and
• interconnections between the one or more first die and the second die through silicon vias, micro bumps, or metal pillars,
• wherein the at least two RF MEMS switches comprise three RF MEMS with a first RF MEMS switch on the respective input transmission line, a second RF MEMS switch on the respective output transmission line, and a third RF MEMS switch interconnecting the respective input transmission line and the respective output transmission line.

A method, comprising:

• electrically receiving N inputs, each at least 10 Gbps, at input transmission lines;
• selectively and electrically interconnecting each input transmission line to a respective output transmission line via at least two Radio Frequency (RF) Microelectromechanical systems (MEMS) switches;
• and
• controlling the at least two RF MEMS switches to provide cross-point switching between the N inputs and M outputs,
• wherein the at least two RF MEMS switches are each formed on a first die with the input transmission lines and the output transmission lines, and
• wherein the at least two RF MEMS switches comprise three RF MEMS with a first RF MEMS switch on the respective input transmission line, a second RF MEMS switch on the respective output transmission line, and a third RF MEMS switch interconnecting the respective input transmission line and the respective output transmission line.