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US 10,239,746 B2Granted
Vertical stopper for capping MEMS devices
AssigneeAnalog Devices, Inc.
InventorsJinbo Kuang, Gaurav Vohra
Life of this patent
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Abstract
Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.
Claims11
A method of operating a microelectromechanical systems (MEMS) device sealed in a cap that comprises a stopper, the method comprising:
- oscillating a movable proof mass of the MEMS device in a first in-plane mode having a mode shape, wherein the stopper is shaped to overlie a periphery of the mode shape and/or internal edges of the movable proof mass;
- and
- damping the motion of the movable proof mass in the first mode using the stopper.
A method of providing damped motion of a capped microelectromechanical systems (MEMS) device, the method comprising:
- oscillating a movable proof mass springedly coupled to a substrate over a mode shape in a plane of motion parallel to and within 20 microns of a stopper of a cap which is coupled to the substrate, the movable proof mass having outer and/or inner edges underlying the stopper.
Dependencies are inferred from the claim text.