Purge device and method of diffusing gas including purge gas
AssigneeMurata Machinery, Ltd.
InventorsMasanao Murata, Mitsuya Tokumoto, Takashi Yamaji
Life of this patent
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Abstract
A purge device includes an internal space defined by a chassis, and performs a purge process where an inside of a storage container in the internal space with an article being accommodated is purged with a purge gas. The purge device includes an air blower that is located outside the chassis, and sends air to an area where a gas including the purge gas in the internal space leaks through an opening in the chassis so as to diffuse the gas including the purge gas leaking from the opening.
Claims4
A purge device that includes an internal space defined by a chassis, and performs a purge process in which an inside of a storage container in the internal space and having an article accommodated therein is purged with a purge gas, the purge device comprising:
- an air blower that is located outside the chassis, and sends air to an area where a gas including the purge gas in the internal space leaks through an opening in the chassis so as to diffuse the gas including the purge gas leaking from the opening.
A method of diffusing a gas including a purge gas leaking from a purge device including an internal space defined by a chassis that includes an opening, the purge device performs a purge process in which an inside of a storage container in the internal space and having an article accommodated therein is purged using the purge gas, the method comprising:
- sending air from an air blower that is located outside the chassis to an area where the gas including the purge gas in the internal space leaks through the opening in the chassis so as to diffuse the gas including the purge gas leaking from the opening.
Dependencies are inferred from the claim text.