Working surface cleaning system and method
AssigneeInternational Test Solutions, Inc.
InventorsAlan Eugene Humphrey, Jerry J. Broz, James H. Duvall
Life of this patent
Estimating the term…
Abstract
A cleaning film designed to remove foreign matter and particulates from working surfaces of cleaning wafers used in semiconductor processes. These processes include wafer sort test for cleaning of probe card pins and FEOL tooling for cleaning during wafer handling equipment and wafer chucks. The debris collected on the cleaning wafer working surfaces is removed by the particle removal film allowing the debris and foreign matter to be discarded. The use of the cleaning film allows the operator to refresh the cleaning wafer without use of an outside vendor and eliminates wet washing and the use of solvents in the cleaning process.
Claims8
A method for operating a semiconductor processing piece of equipment while cleaning the semiconductor processing piece of equipment using a cleaning film, comprising:
- cleaning a semiconductor processing piece of equipment using a cleaning wafer having a cleaning polymer wherein debris becomes embedded in a top surface of the cleaning polymer;
- removing the cleaning wafer from the semiconductor processing piece of equipment;
- applying a cleaning film to the cleaning wafer to remove debris embedded in the top surface of the cleaning polymer, wherein a difference in one of surface tack and adhesion force between the cleaning film and the cleaning polymer of the cleaning wafer causes the debris to release from the top surface of the cleaning polymer of the cleaning wafer onto the cleaning film without using a solvent;
- and
- returning the cleaning wafer to the semiconductor processing piece of equipment so that the semiconductor processing piece of equipment is cleaned using the cleaning wafer.
Dependencies are inferred from the claim text.