Thermocycling system, composition, and microfabrication method

A system for thermocycling biological samples within detection chambers comprising:

• a set of heater-sensor dies, each heater-sensor die in the set of heater-sensor dies comprising:
• an assembly including a first insulating layer;
• a heating region comprising a heating element, a sensing element, an adhesion material layer coupled to the first insulating layer, and a noble metal layer coupled to the adhesion material layer;
• and
• a second insulating layer coupled to the first insulating layer through a pattern of voids in the heating region;
• wherein the pattern of voids in the heating region defines:
• a first pattern comprising a global morphology at a first size scale, the first pattern associated with the heating element of the heating region;
• and
• a second pattern comprising a local morphology at a second size scale smaller than the first size scale, the second pattern integrated into the first pattern and associated with the sensing element of the heating region;
• wherein the assembly further comprises an intermediate buffer layer comprising at least one of platinum and titanium, situated between the adhesion material layer and the noble metal layer, and operable to provide a barrier against diffusion between the adhesion material layer and the noble metal layer.