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US 10,231,061 B2Granted
Sound transducer with housing and MEMS structure
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Ulrich Krumbein
Life of this patent
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Abstract
A sound transducer includes a housing with a sound port and a MEMS structure disposed in an interior space of the housing. The MEMS structure and the sound port are acoustically coupled to each other. The MEMS structure separates a front volume from a back volume of the housing. At least one vent hole of the MEMS structure allows a gas exchange between the front volume and the back volume. The sound port allows a liquid to enter the front volume. Further, the MEMS structure prevents liquid from entering the back volume.
Claims25
A sound transducer,
- comprising a housing and a MEMS structure,
- wherein a sound port is disposed in the housing,
- wherein the MEMS structure is disposed in an interior space of the housing,
- wherein the MEMS structure and the sound port are acoustically coupled to each other,
- wherein the MEMS structure separates a front volume of the housing from a back volume of the housing,
- wherein at least one vent hole of the MEMS structure allows a gas exchange between the front volume and the back volume,
- wherein the sound port allows a liquid to enter the front volume, and
- wherein the MEMS structure prevents liquid from entering the back volume from the front volume.
5 more elements
A sound transducer,
- comprising a housing and a MEMS structure,
- wherein at least one vent hole is disposed in a diaphragm of the MEMS structure, and
- wherein a sidewall of the vent hole of the diaphragm of the MEMS structure comprises a hydrophobic structure configured to prevent liquid from passing from a front volume of the housing to a back volume of the MEMS structure through the diaphragm via the vent hole of the diaphragm.
Dependencies are inferred from the claim text.