Movable support and lithographic apparatus
AssigneeASML Netherlands B.V.
InventorsAntonius Franciscus Johannes De Groot, Theo Anjes Maria Ruijl, Christiaan Louis Valentin, Christian Werner
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AssigneeASML Netherlands B.V.
InventorsAntonius Franciscus Johannes De Groot, Theo Anjes Maria Ruijl, Christiaan Louis Valentin, Christian Werner
Estimating the term…
A movable support configured to support an object, the support including: a support plane to support the object, an actuator assembly to move the movable support in a first direction and in a second direction perpendicular to the first direction, wherein the first direction and the second direction extend in a plane parallel to the support plane, wherein the actuator assembly includes: a first actuator configured to exert a first actuation force in a first actuation direction, the first actuation direction being parallel to the support plane, a second actuator configured to exert a second actuation force in a second actuation direction, the second actuation direction being parallel to the support plane, wherein the first actuation direction and the second actuation direction are arranged non-parallel and non-perpendicular with respect to each other.
A movable support configured to support an object, the movable support comprising:
A lithographic apparatus comprising a movable support configured to support an object, the movable support comprising:
A method comprising:
Dependencies are inferred from the claim text.