Permanent-magnet particle beam apparatus and method incorporating a non-magnetic metal portion for tunability
AssigneeKLA-Tencor Corporation
InventorsTomas Plettner, John David Gerling, Mohammed Tahmassebpur
Life of this patent
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Abstract
A permanent-magnet particle beam apparatus and method incorporating a non-magnetic portion for tunability are provided. The permanent-magnet particle beam apparatus includes a particle beam emitter that emits a charged particle beam, and includes a set of permanent magnets forming a magnetic field for controlling condensing of the charged particle beam. The permanent-magnet particle beam apparatus further includes a non-magnetic electrical conductor component situated with the set of permanent magnets to control a kinetic energy of the charged particle beam moving through the magnetic field.
Claims18
A permanent-magnet particle beam apparatus, comprising:
- charged particle beam emitter that emits a charged particle beam;
- a non-magnetic electrical conductor component with a channel through which the charged particle beam travels, the non-magnetic electrical conductor component controlling kinetic energy of the charged particle beam;
- and
- a set of permanent magnets forming a magnetic field for controlling condensing of the charged particle beam, the set of permanent magnets having an input opening facing an output opening of the non-magnetic electrical conductor component, such that the charged particle beam enters the magnetic field at the input opening of the set of permanent magnets from the output opening of the non-magnetic electrical conductor component, for being condensed.
A method for controlling a particle beam through a permanent-magnet particle beam apparatus, comprising:
- emitting, by a charged particle beam emitter, a charged particle beam;
- transmitting the charged particle beam through a channel of non-magnetic electrical conductor component to control a kinetic energy of the charged particle beam;
- and
- receiving, at an input opening of a set of permanent magnets facing an output opening of the non-magnetic electrical conductor component, the charged particle beam output from the non-magnetic electrical conductor component;
- transmitting the charged particle beam through a magnetic field formed by the set of permanent magnets for controlling condensing of the charged particle beam.
Dependencies are inferred from the claim text.