Waveform mapping and gated laser voltage imaging
AssigneeFEI Company
InventorsChristopher Nemirow, Neel Leslie
Life of this patent
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AssigneeFEI Company
InventorsChristopher Nemirow, Neel Leslie
Estimating the term…
Systems, methods, and computer readable media to improve integrated circuit (IC) debug operations are described. In general, techniques are disclosed for acquiring/recording waveforms across an under-test IC during a single sweep of a laser scanning microscope (LSM). More particularly, techniques disclosed herein permit the acquisition of an integrated circuit's response to a test signal at each location across the IC in real-time. In practice the test signal consists of a stimulus portion that repeats after a given period. In one embodiment, the IC's response to multiple complete stimulus portions may be averaged and digitized. In another embodiment, the IC's response to multiple partial stimulus portions may be averaged and digitized. As used herein, the former approach is referred to as waveform mapping, the latter as gated-LVI.
A system for testing a circuit, comprising:
A system for testing a circuit, comprising:
A diagnostic measurement method, comprising:
Dependencies are inferred from the claim text.