Method for producing an arc detection signal and arc detection arrangement

An arc detection system for a plasma system, the arc detection system comprising a combiner to which a plurality of observation signals are supplied, the combiner comprising:

• at least two arc detection part-signal generators to each of which an observation signal is supplied, each arc detection part-signal generator being configured to generate an arc detection part-signal, each observation signal being generated based on a respective measurement signal of the plasma system, at least one of the observation signals being generated by the respective measurement signal being amplified, filtered, differentiated according to time, normalized with noise thereof, or mathematically processed, at least one of the observation signals having a corresponding indication for an arc in the plasma system, each arc detection part-signal generator comprising:
• a multiplier configured to multiply the observation signal with a coefficient to produce the arc detection part-signal;
• a correlator configured to correlate the observation signal with a respective correlation signal to produce a correlation result, at least one of the correlation signals being one of a signal related to a previously established arc detection signal, an arc detection signal which establishes an arc detection in an independent manner, and an externally produced signal;
• and
• a coefficient producer which is connected to the correlator and the multiplier and is configured to produce the coefficient based on the correlation result;
• and
• an adder connected to each of the arc detection part-signal generators to receive the arc detection part-signals and generate the arc detection signal for detecting whether an arc is present in the plasma system.