Probe position inspection apparatus, semiconductor device inspection apparatus and semiconductor device inspection method

A method of inspecting a semiconductor device through the use of an apparatus for inspecting a semiconductor device,

• the apparatus for inspecting a semiconductor device comprising:
• a probe position inspection apparatus comprising:
• a transparent plate;
• a camera for taking an image of one surface of said transparent plate;
• and
• a pressure passive member covering the other surface, opposite to the one surface, of said transparent plate,
• wherein the tip of a probe for use in evaluation of a semiconductor device is pressed against said other surface of said transparent plate, with said pressure passive member therebetween,
• said probe position inspection apparatus further comprising an image processor for processing the image taken by said camera to detect the position of said probe in the plane of said transparent plate;
• a chuck stage for placing said semiconductor device thereon;
• said probe coming into contact with said semiconductor device;
• and
• a test controller for sending and receiving signals to and from said probe to thereby evaluate an electrical characteristic of said semiconductor device placed on the upper surface of said chuck stage, wherein said transparent plate of said probe position inspection apparatus is disposed near said chuck stage;
• said method comprising:
• (a) taking an image of said one surface of said transparent plate, with said pressure passive member pressed by said probe, said (a) being performed by said camera;
• (b) processing the image taken by said camera to detect the position of said probe, thereby judging whether the position of said probe coincides with a previously determined position or not, said (b) being performed by said image processor;
• and
• (c) determining whether to perform an evaluation of an electrical characteristic of said semiconductor device or not, based on the result of judgement of said image processor, said (c) being performed by said test controller.