Probe and object information acquisition apparatus using the same

A probe comprising:

• a capacitive electromechanical transducer including a first electrode, a vibration film, and a second electrode, a space being provided between the first and second electrodes so that the vibration film can vibrate with the second electrode due to receiving an acoustic wave;
• a support layer comprising a resin disposed over the vibration film;
• an optical reflection layer transmitting the acoustic wave and disposed on the support layer;
• a protection layer disposed on the optical reflection layer;
• and
• an acoustic matching layer formed on the vibration film, the support layer being disposed on the acoustic matching layer,
• wherein the support layer supports the optical reflection layer,
• wherein the acoustic matching layer is provided for conformity of acoustic impedance between the vibration film and the support layer, and
• wherein the protection layer has a thickness equal to or less than 10 μm and a principal ingredient comprising a resin.

A probe for receiving photoacoustic waves caused by irradiation of an object with light, said probe comprising:

• a transducer including a first electrode, a vibration film, and a second electrode, a space being provided between the first and the second electrodes so that the vibration film can vibrate with the second electrode;
• a support layer disposed over the vibration film;
• an acoustic matching layer disposed between the support layer and the vibration film;
• an optical reflection layer, for reflecting the light, disposed on the support layer;
• and
• a protection layer disposed on the optical reflection layer.

A probe for receiving photoacoustic waves caused by irradiation of an object with light, said probe comprising:

• a transducer including a first electrode and a second electrode;
• a support layer disposed over a vibration film;
• an optical reflection layer, for reflecting the light, disposed on the support layer;
• a protection layer disposed on the optical reflection layer;
• and
• an acoustic matching laying between the vibration film and the support layer.