Sensor arrangement for particle analysis and a method for particle analysis
AssigneeInfineon Technologies AG
InventorsGuenther Ruhl, Thomas Hirsch, Gerhard Poeppel, Herbert Roedig
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AssigneeInfineon Technologies AG
InventorsGuenther Ruhl, Thomas Hirsch, Gerhard Poeppel, Herbert Roedig
Estimating the term…
According to various embodiments, a sensor arrangement for particle analysis may include: a base electrode configured to generate an electrical field for particle attraction; a support layer disposed over the base electrode; a sensor array disposed over the support layer and including or formed from a plurality of sensor elements, wherein each sensor element of the plurality of sensor elements is configured to generate or modify an electrical signal in response to a particle at least one of adsorbed to and approaching the sensor element; and an electrical contact structure may include or be formed from a plurality of contact lines, wherein each contact line of the plurality of contact lines is electrically connected to a respective sensor element of the plurality of sensor elements, such that each sensor element of the plurality of sensor elements is addressable via the contact structure.
A sensor arrangement for particle analysis, comprising:
A method for particle analysis, comprising:
A sensor arrangement for particle analysis, comprising:
Dependencies are inferred from the claim text.