X-ray inspection system and method for rotating a test object by means of such an X-ray inspection system
AssigneeYxlon International GmbH
InventorsAndreas Mecke, Jan Spalding, Axel Klein
Life of this patent
Estimating the term…
Abstract
An X-ray inspection system includes an X-ray source and a detector. A rotary table is arranged between the X-ray source and the detector. The rotary table is configured to secure a test object on the rotary table. The rotary table is arranged on a positioning table. The positioning table is configured to move parallel to an xy-plane between the X-ray source and the detector. The xy-plane is perpendicular to a surface of the detector extending parallel to the xz-plane and the rotary table is configured to rotate about a z-axis.
Claims10
A method for rotating a test object in an X-ray inspection system, the X-ray inspection system comprising:
- an X-ray source having a central beam running in parallel to a y-axis;
- a detector;
- and a rotary table arranged between the X-ray source and the detector, the rotary table having a rotation axis defining a z-axis, being configured to be rotated about the z-axis, having a surface corresponding to an x-axis and the y-axis that is configured to secure a test object thereon, being arranged on a positioning table, which is configured to be moved parallel to an xy-plane between the X-ray source and the detector, the xy-plane being perpendicular to a surface of the detector extending parallel to the xz-plane, the method comprising:
- securing the test object on the rotary table;
- and
- rotating the rotary table about the z-axis and simultaneously moving the positioning table in the xy-plane, wherein the angle of rotation φ of the rotary table has the following relationships to x- and y-positions of the positioning table:
- X=R×cos(φ−φ0)+X0
- Y=R×sin(φ−φ0)+Y0
- with
- X:
- a new target value of an x-axis,
- X0:
- a starting value of the x-axis at a starting time of a virtual axis coupling,
- Y:
- a new target value of a y-axis,
- Y0:
- a starting value of the y-axis at the starting time of the virtual axis coupling,
- R:
- a distance between an axis of rotation and a new virtual axis of rotation,
- φ:
- an actual angle of the axis of rotation, and
- φ0:
- a starting value of the axis of rotation at the starting time of the virtual axis coupling.
A method for rotating a test object in an X-ray inspection system, the X-ray inspection system comprising:
- an X-ray source having a central beam running in parallel to a y-axis a detector;
- and a rotary table arranged between the X-ray source and the detector, the rotary table having a rotation axis defining a z-axis, being configured to be rotated about the z-axis, having a surface corresponding to an x-axis and the y-axis that is configured to secure a test object thereon, being arranged on a positioning table, which is configured to be moved parallel to an xy-plane between the X-ray source and the detector, the xy-plane being perpendicular to a surface of the detector extending parallel to the xz-plane, the method comprising:
- securing the test object on the rotary table;
- and
- rotating the X-ray source in conjunction with the detector about the test object about a rotational axis parallel to the z-axis and simultaneously moving the X-ray source parallel to the xy-plane, wherein the angle of rotation φ of the rotary table has the following relationships to x- and y-positions of the positioning table:
- X=R×cos(φ−φ0)+X0
- Y=R×sin(φ−φ0)+Y0
- with
- X:
- a new target value of an x-axis,
- X0:
- a starting value of the x-axis at a starting time of a virtual axis coupling,
- Y:
- a new target value of the y-axis,
- Y0:
- a starting value of the y-axis at the starting time of the virtual axis coupling,
- R:
- a distance between an axis of rotation and a new virtual axis of rotation,
- φ:
- an actual angle of the axis of rotation, and
- φ0:
- a starting value of the axis of rotation at the starting time of the virtual axis coupling.
Dependencies are inferred from the claim text.