Optical measurement of thin films
AssigneeNanosys, Inc.
InventorsAmanda Carpenter, Robert Wilson, Ernest C. Lee, Alexander Puski
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Abstract
Embodiments of measurement apparatus for measuring the optical properties of a sample film are described. The measurement apparatus includes a first stage, a second stage, and an arm structure coupled to the second stage. The first stage includes an optical source and a block of transparent material. The block of transparent material includes a surface that supports a sample film. The second stage includes a plurality of layers and an optical detector. The arm structure is designed to translate the second stage with respect to the first stage.
Claims20
An apparatus configured to measure optical properties of a sample film, the apparatus comprising:
- a first stage comprising:
- an optical source, and
- a block of transparent material, wherein a surface of the block of transparent material is configured to support the sample film;
- a second stage comprising:
- a plurality of layers comprising at least one diffuser film,
- an optical detector, and
- a metal sheet disposed between the optical detector and the plurality of layers;
- and
- an arm structure coupled to the second stage, and configured to translate the second stage with respect to the first stage.
A method of measuring optical properties of a sample film, the method comprising:
- placing the sample film onto a first stage;
- positioning a second stage onto the sample film using an arm structure coupled to the second stage, such that the sample film is sandwiched between the first stage and the second stage, the second stage having an optical detector, a given layer structure with at least one diffuser film, and a metal sheet disposed between the optical detector and the given layer structure;
- generating light via an optical source in the first stage;
- receiving light at the optical detector;
- and
- determining one or more optical properties of the sample film based on the light received by the optical detector.
Dependencies are inferred from the claim text.