Stacked lateral overlap transducer (SLOT) based three-axis accelerometer

A method of fabricating a device, comprising:

• forming the following on a substrate that extends substantially in a first plane:
• a first plurality of electrodes substantially along a first axis;
• a second plurality of electrodes substantially along a second axis;
• and
• a first central anchor;
• forming a frame and a proof mass that extend substantially in a second plane, wherein the frame is attached to the first central anchor and wherein forming the proof mass includes:
• forming a first plurality of slots, in the proof mass, that extend substantially along the first axis;
• and
• forming a second plurality of slots, in the proof mass, that extend substantially along the second axis,
• wherein forming the frame involves:
• forming first flexures that are configured for attaching the proof mass to the frame and for allowing the proof mass to move substantially along the first axis without causing the frame to move along the first axis, and
• forming second flexures that are configured for attaching the frame to the first central anchor, for substantially constraining the frame for motion along the second axis and for allowing the proof mass and the frame to move together along the second axis;
• and
• wherein the first and second pluralities of electrodes are formed substantially in a third plane that is disposed between the first plane and the second plane, the third plane separated from the second plane by a gap.