Microelectromechanical structure with enhanced rejection of acceleration noise

A device, comprising:

• a substrate;
• an anchor attached to the substrate;
• a first pair of sensing masses coupled to the anchor;
• a second pair of sensing mases coupled to the anchor;
• and
• a third pair of sensing masses coupled to the second pair of sensing masses,
• wherein the first and second pairs of sensing masses are rectangular and the third pair of sensing masses are C-shaped masses.

A device, comprising:

• a substrate;
• an anchor attached to the substrate;
• a first pair of sensing masses coupled to the anchor aligned along a first axis;
• a second pair of sensing mases coupled to the first pair of sensing masses and aligned along the first axis, a first one of the second pair of sensing masses being separated from a second one of the second pair of sensing masses by the first pair of sensing masses;
• and
• a third pair of sensing masses coupled to at least one of the first pair of sensing masses or the anchor.

A device, comprising:

• a substrate;
• an anchor attached to the substrate;
• a first pair of sensing masses coupled to the anchor and aligned along a first axis;
• a second pair of sensing mases coupled to the anchor and aligned along the first axis;
• and
• a third pair of sensing masses coupled to the second pair of masses.