Interference observation device
AssigneeHamamatsu Photonics K.K.
InventorsToyohiko Yamauchi, Hidenao Yamada
Life of this patent
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Abstract
An interference observation apparatus includes a light source, a splitting beam splitter, a combining beam splitter, a beam splitter, a mirror, a beam splitter, a mirror, a piezo element, a stage, an imaging unit, an image acquisition unit, and a control unit. An interference optical system from the splitting beam splitter to the combining beam splitter forms a Mach-Zehnder interferometer. The mirror freely moves in a direction perpendicular to a reflecting surface of the mirror. The total number of times of respective reflections of first split light and second split light in the interference optical system is an even number.
Claims7
An interference observation apparatus, comprising:
- a light source configured to output incoherent light;
- and
- an interference optical system forming a Mach-Zehnder interferometer and including a splitting beam splitter configured to split the light output from the light source to output first split light and second split light, and a combining beam splitter configured to combine the first split light and the second split light to output combined light, wherein
- the interference optical system
- includes a second beam splitter and a second mirror on an optical path of the second split light, is configured to cause the second beam splitter to transmit or reflect the second split light arrived at the second beam splitter from the splitting beam splitter and then cause the second mirror to reflect the second split light, cause the second beam splitter to reflect or transmit the second split light reflected by the second mirror and arrived at the second beam splitter, output the second split light from the second beam splitter in a direction different from an input direction of the second split light from the splitting beam splitter to the second beam splitter, and freely move the second mirror in a direction perpendicular to a reflecting surface of the second mirror,
- includes an optical element on an optical path of the first split light such that the total number of times of respective reflections of the first split light and the second split light is an even number, and
- includes a first beam splitter and a first mirror as the optical element on the optical path of the first split light, is configured to cause the first beam splitter to transmit or reflect the first split light arrived at the first beam splitter from the splitting beam splitter and then cause the first mirror to reflect the first split light, cause the first beam splitter to reflect or transmit the first split light reflected by the first mirror and arrived at the first beam splitter, and output the first split light from the first beam splitter in a direction different from an input direction of the first split light from the splitting beam splitter to the first beam splitter.
Dependencies are inferred from the claim text.