Fabrication and monitoring device for micro probe ball tip

A fabrication and monitoring device for micro probe ball tips, comprising:

• an optical platform (1a), wherein a left-right direction of the optical platform (1a) is defined as an x-axis, a front-rear direction is defined as a y-axis, and a vertical direction is defined as a z-axis;
• wherein the optical platform (1a) is equipped with:
• a U-shaped electromagnet (8), comprising a U-shaped yoke (8c) and two wire wraps (8b), wherein the U-shaped yoke (8c) is vertically mounted on the optical platform (1a), and two U-shaped arms of the U-shaped yoke symmetrically arranged according to the y-axis;
• the two wire wraps (8b) are respectively provided on opposite faces of the two U-shaped arms, and are also symmetrically arranged according to the y-axis;
• a 2-dimensional moving platform (7) mounted to a left of the U-shaped electromagnet (8) on the optical platform (1a) along the x-axis, wherein the 2-dimensional moving platform (7) comprises a first carrier platform which is moveable along the x-axis and the y-axis;
• a first damper (6b) and a second damper (6c) are vertically installed on the first carrier platform and are arranged in a line along the x-axis;
• a first through hole and a second through hole with equal sizes are respectively drilled on the first damper (6b) and the second clamper (6c);
• the first through hole and the second through hole are coaxial and an axis thereof is parallel to the x-axis;
• an extending line of the axis of the first through hole and the second through hole passes directly above a center point between the two wire wraps (8b) of the U-shaped electromagnet (8);
• a guiding tube (6a) is coaxially clamped in both the first through hole of the first damper (6b) and the second through hole of the second clamper (6c);
• a tungsten wire (6d) is coaxially provided in the guiding tube (6a), and a right end of the tungsten wire (6d) extends out of a right end of the guiding tube (6a);
• a left end of the guiding tube (6a) is connected to a positive electrode of an external power source, and the right end of the guiding tube (6a) extends directly above the center point between the two wire wraps (8b) of the U-shaped electromagnet (8);
• a 1-dimensional moving platform (9) mounted to a right of the U-shaped electromagnet (8) on the optical platform (1a) along the x-axis, wherein the 1-dimensional moving platform (9) comprises a second carrier platform which is moveable along the z-axis;
• a third damper (10b) is vertically installed on the second carrier platform and a third through hole is drilled on the third clamper (10b);
• the third through hole on the third clamper (10b) is coaxial with the first through hole and the second through hole on the first clamper (6b) and the second clamper (6c);
• a sparking plug (10a) is coaxially clamped in the third through hole of the third damper (10b) on the second carrier platform;
• a right end of the sparking plug (10a) is connected to a negative electrode of the external power source, and a left end of the sparking plug (10a) extends directly above the center point between the two wire wraps (8b) of the U-shaped electromagnet (8);
• the sparking plug (10a) is moveable with the second carrier platform to a position wherein the left end of the sparking plug (10a) is directed to the tungsten wire (6d) extending out of the right end of the guiding tube (6a) in the 2-dimensional moving platform (7);
• a transparent sealing tank (1g) mounted on the optical platform (1a) in a sealed form and covering the 2-dimensional moving platform (7), the 1-dimensional moving platform (9) and the U-shaped electromagnet (8), wherein a fourth through hole corresponding to the left end of the guiding tube (6a) of the 2-dimensional moving platform (7) is drilled on a left side of the transparent sealing tank (1g);
• a gas inlet (1d) is also provided at the left side of the transparent sealing tank (1g), and is connected to an external argon source;
• a vacuum vent (1j) is provided at a right side of the transparent sealing tank (1g);
• a fifth through hole corresponding to a position which is directly above the center point between the two wire wraps (8b) of the U-shaped electromagnet (8) is drilled on a top of the transparent sealing tank (1g);
• a pair of operation holes (1b), which are arranged in a line along the left-right direction, are drilled on a front side of the transparent sealing tank (1g), and rotating sheets (1c) are respectively mounted on the operation holes (1b) on the front side of the transparent sealing tank (1g) in a rotating cover form;
• and an image monitoring system (2) mounted on a rear of the transparent tank (1g) on the optical platform (1a), wherein the image monitoring system (2) comprises a supporting frame (2h), and a bottom end of the supporting frame (2h) is mounted on the optical platform (1a);
• a top end of the supporting frame (2h) extends forwards to the top of the transparent sealing tank (1g);
• a z-axis rectangle rail platform (2f) is mounted on the top end of the supporting frame (2h), and a sliding platform along the z-axis is provided on the z-axis rectangle rail platform (2f);
• a charge-coupled device camera (2d) is mounted on the sliding platform through a fixer;
• a third-generation infinite beam structure lens (2c) is installed on the charge-coupled device camera (2d), and is hung above the fifth through hole on the top of the transparent sealing tank (1g) in a vertically downward form;
• a micro objective (2a) is coaxially mounted on the third-generation infinite beam structure lens (2c);
• the micro objective (2a) extends into the transparent tank (1g) through the fifth through hole on the top of the transparent tank (1g), and a rubber ring is provided between the micro objective (2a) and the fifth through hole for sealing.