Apparatus and method for managing a temperature profile using reflective energy in a thermal decomposition reactor
AssigneeREC Silicon Inc
InventorsTimothy Troutman, Bryan J. Loushin, Joe Ruschetti
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AssigneeREC Silicon Inc
InventorsTimothy Troutman, Bryan J. Loushin, Joe Ruschetti
Estimating the term…
Embodiments of a reflective surface and a reflector comprising a reflective surface for use in a thermal decomposition reactor are disclosed. Methods for using the reflective surface, or reflector comprising the reflective surface, to manage a temperature profile in a silicon rod grown in the thermal decomposition reactor are also disclosed. The reflective surface is configured to receive radiant heat energy emitted from an energy emitting region of an elongated polysilicon body grown during chemical vapor deposition onto a silicon filament and reflect at least a portion of the received radiant heat energy to a reflected energy receiving region of the elongated polysilicon body or to a reflected energy receiving region of a second elongated polysilicon body, to thereby add radiant heat energy to the reflected energy receiving region.
In a thermal decomposition reactor for producing one or more elongated polysilicon bodies by chemical vapor deposition of silicon onto one or more heated silicon filaments in a chamber of a reactor vessel, a device comprising:
Dependencies are inferred from the claim text.