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US 10,208,375 B2Granted
Evaporation source and evaporation device
AssigneeBoe Technology Group Co., Ltd.
InventorsDejiang Zhao, Seiji Fujino, Changhai Feng
Life of this patent
Estimating the term…
Abstract
An evaporation source includes a heat source structure and an evaporation container for accommodating a to-be-evaporated material. The heat source structure includes a heat source and a thermal conductor. The thermal conductor is in contact with the evaporation container, and the heat source is at the thermal conductor and around the evaporation container.
Claims20
An evaporation source, comprising:
- a heat source structure and an evaporation container for accommodating a to-be-evaporated material;
- wherein the heat source structure comprises a heat source and a thermal conductor, and the thermal conductor is in contact with the evaporation container, and the heat source is at the thermal conductor and around the evaporation container;
- wherein the thermal conductor comprises a first portion and a second portion;
- the second portion is of a hollow, cylindrical shape, and a hollow portion of the second portion defines a first accommodation space;
- and
- wherein the evaporation container is in the first accommodation space;
- the first portion is in the first accommodation space and includes a plurality of spaced thermally conductive sheets;
- each thermally conductive sheet is on an inner wall of the second portion and is perpendicular to the inner wall of the second portion;
- and each thermally conductive sheet abuts against the evaporation container;
- wherein the evaporation source further includes a cooling structure configured to cool the evaporation container during or after a heating process;
- the cooling structure is disposed in the thermally conductive sheets.
8 more elements
An evaporation source, comprising:
- a heat source structure and an evaporation container for accommodating a to-be-evaporated material;
- wherein the heat source structure comprises a heat source and a thermal conductor in contact with the evaporation container;
- the heat source is at the thermal conductor with a heat transfer path defined from the heat source to the evaporation container, and the heat transfer path passes through at least a portion of the thermal conductor;
- wherein the thermal conductor comprises a first portion and a second portion;
- the second portion is of a hollow, cylindrical shape, and a hollow portion of the second portion defines a first accommodation space;
- the evaporation container is in the first accommodation space;
- and
- wherein the first portion is in the first accommodation space and includes a plurality of spaced thermally conductive sheets;
- each thermally conductive sheet is on an inner wall of the second portion and is perpendicular to the inner wall of the second portion;
- and each thermally conductive sheet abuts against the evaporation container;
- wherein the evaporation source further includes a cooling structure configured to cool the evaporation container during or after a heating process;
- the cooling structure is disposed in the thermally conductive sheets.
9 more elements
Dependencies are inferred from the claim text.