Production method for deposition mask

A production method for a deposition mask, the deposition mask comprising:

• a resin film in which multiple opening patterns each having a shape and dimensions that are the same as those of a corresponding one of multiple thin film patterns to be formed in a substrate are formed at positions corresponding to the multiple thin film patterns;
• and
• a sheet magnetic metal member in which multiple through holes each sized to include the corresponding opening pattern are formed, the magnetic metal member contacting tightly with the resin film,
• the production method comprising the sequential steps of:
• forming a mask member having a structure in which the magnetic metal member having the through holes and the resin film before forming the opening patterns, contact tightly with each other;
• placing the mask member and a reference substrate on a stage of a laser machining apparatus with the resin film of the mask member contacting tightly with the reference substrate, the reference substrate having a reference pattern, the laser machining apparatus including a first mask in which multiple first through holes for forming the opening patterns are provided at predetermined positions around, as a center, an optical axis of the laser machining apparatus, and a second mask in which a second through hole for forming a mark having a specified shape and a specified depth is provided so that the second through hole is centered on the optical axis;
• using an imaging device included in the laser machining apparatus to image the reference pattern and centering the reference pattern on the optical axis;
• forming the mark by irradiating a part of the film through a corresponding one of the through holes of the mask member with a laser beam using the second through hole of the second mask, the part being positioned correspondingly to that of the reference patterns of the reference substrate;
• using the imaging device to image the mark and centering the mark on the optical axis;
• and
• forming, at the same time, the opening patterns that penetrate the film by irradiating predetermined positions around the mark as a center with laser beams using the first through holes of the first mask.