Curable composition, film, and method of producing film

A curable composition, which is suitable for use in imprinting, the curable composition comprising:

• a polymerization initiator;
• a radically polymerizable compound;
• and
• an internal addition type release agent having a hydrophilic functional group,
• wherein the internal addition type release agent is a compound represented by formula (A):
• R—(OR′)n—X (A),
• wherein, in the formula (A), R represents an alkyl group having 10 to 20 carbon atoms, OR′ represents an oxyethylene group, X represents a hydroxyl group, and n represents an integer of 3 to 30, and
• wherein the curable composition satisfies formula (1):
• −5%≤{(γ1−γ2)/γ1}≤5% (1),
• wherein, in the formula (1), γ1 represents a surface tension of the curable composition at 25° C., and γ2 represents a surface tension of a curable composition for evaluation at 25° C., the curable composition for evaluation having the same composition as that of the curable composition except that the curable composition for evaluation is free of the internal addition type release agent.

A method of producing a film having a predetermined pattern shape and placed on a substrate, the method comprising:

• a placing step of placing a curable composition on the substrate;
• a mold contact step of bringing a mold having a hydrophilic surface and the curable composition into contact with each other;
• a curing step of curing the curable composition with one of light and heat to produce a cured film;
• and
• a releasing step of releasing the mold from the cured film,
• wherein the curable composition comprises a polymerization initiator, a polymerizable compound, and an internal addition type release agent having a hydrophilic functional group,
• wherein the internal addition type release agent is a compound represented by formula (A):
• R—(OR′)n—X (A),
• wherein, in the formula (A), R represents an alkyl group having 10 to 20 carbon atoms, OR′ represents an oxyethylene group, X represents a hydroxyl group, and n represents an integer of 3 to 30, and
• wherein the internal addition type release agent is prevented from being unevenly distributed in a gas-liquid interface of the curable composition in the placing step.

A method of producing a substrate with a circuit, the method comprising performing one of etching and ion implantation based on a pattern shape of a film obtained by a method of producing a film having a predetermined pattern shape and placed on a substrate to form a circuit structure on the substrate based on the pattern shape,

• the method of producing the film comprising:
• a placing step of placing a curable composition on the substrate;
• a mold contact step of bringing a mold having a hydrophilic surface and the curable composition into contact with each other;
• a curing step of curing the curable composition with one of light and heat to produce a cured film;
• and
• a releasing step of releasing the mold from the cured film,
• wherein the curable composition comprises a polymerization initiator, a polymerizable compound, and an internal addition type release agent having a hydrophilic functional group,
• wherein the internal addition type release agent is a compound represented by formula (A):
• R—(OR′)n—X (A),
• wherein, in the formula (A), R represents an alkyl group having 10 to 20 carbon atoms, OR′ represents an oxyethylene group, X represents a hydroxyl group, and n represents an integer of 3 to 30, and
• wherein the internal addition type release agent is prevented from being unevenly distributed in a gas-liquid interface of the curable composition in the placing step.

An optical member, comprising:

• a substrate;
• and
• a film placed on the substrate,
• wherein the film is a cured film produced by a method of producing a film having a predetermined pattern shape, the method comprising:
• a placing step of placing a curable composition on the substrate;
• a mold contact step of bringing a mold having a hydrophilic surface and the curable composition into contact with each other;
• a curing step of curing the curable composition with one of light and heat to produce a cured film;
• and
• a releasing step of releasing the mold from the cured film,
• wherein the curable composition comprises a polymerization initiator, a polymerizable compound, and an internal addition type release agent having a hydrophilic functional group,
• wherein the internal addition type release agent is a compound represented by formula (A):
• R—(OR′)n—X (A),
• wherein, in the formula (A), R represents an alkyl group having 10 to 20 carbon atoms, OR′ represents an oxyethylene group, X represents a hydroxyl group, and n represents an integer of 3 to 30, and
• wherein the internal addition type release agent is prevented from being unevenly distributed in a gas-liquid interface of the curable composition in the placing step.