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US 10,207,918 B2Granted
Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
AssigneeCanon Kabushiki Kaisha
InventorChienliu Chang
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Abstract
An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.
Claims8
An electromechanical transducer comprising:
- at least two elements, each element including:
- a first electrode;
- a vibrating membrane formed above the first electrode so that a cavity is located between the vibrating membrane and the first electrode;
- and
- a second electrode formed on an upper surface of the vibrating membrane;
- and
- an insulating protective layer formed both on the upper surface of vibrating membrane and on an upper surface of the second electrode,
- wherein the protective layer covers both the second electrode and wiring connecting to the second electrode, and
- wherein the protective layer is not formed above an area located between adjacent two cavities.
6 more elements
Dependencies are inferred from the claim text.