MEMS device, liquid ejecting head, liquid ejecting apparatus, and MEMS device manufacturing method
AssigneeSeiko Epson Corporation
InventorsMotoki Takabe, Shingo Tomimatsu, Shunsuke Watanabe
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Abstract
A MEMS device includes a first substrate provided with a plurality of first electrode terminals and a second substrate composed of a crystalline substrate and provided with a plurality of second electrode terminals respectively corresponding to the first electrode terminals. The first electrode terminals and the second electrode terminals are electrically bonded one-to-one. Protrusions are formed at positions corresponding to the first electrode terminals on a mounting face of the second substrate opposing the first substrate. The second electrode terminals include the protrusions and conductive material covering the protrusions.
Claims8
A liquid electing head comprising:
- a pressure chamber-forming plate in which a pressure chamber is formed, the pressure chamber being configured to be filled with a liquid;
- a nozzle in fluid communication with the pressure chamber;
- a vibration plate positioned on the pressure chamber-forming plate so as to overlap the pressure chamber in a cross-sectional view;
- a piezoelectric element positioned on the vibration plate, the piezoelectric element being directly adjacent to the pressure chamber via the vibration plate;
- a flexible substrate having a plurality of first electrode terminals thereon, each of the plurality of first electrode terminals being a first projection projecting from a surface of the flexible substrate, and adjacent pairs of the plurality of first electrode terminals being spaced apart from each other via a first distance in a terminal array direction in a cross sectional view;
- and
- a crystalline substrate having a plurality of second electrode terminals, each of the plurality of second electrode terminals being a second projection having a conductive layer covering the second projection, and adjacent pairs of the plurality of second electrode terminals being spaced apart from each other via a second distance in the terminal array direction in the cross sectional view,
- wherein the crystalline substrate is disposed above the piezoelectric element via a space so that the piezoelectric element is deformable in the space, and the flexible substrate is disposed at a side opposite to the piezoelectric element with respect to the crystalline substrate,
- a tip of each of the plurality of first projections is connected to a corresponding tip of each of the plurality of second projections, and
- each of the plurality of second projections is unitary with the crystalline substrate.
Dependencies are inferred from the claim text.