US 10,207,502 B2 · Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

Abstract

A liquid ejecting head includes a piezoelectric element having a first electrode on a vibration plate, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric material layer. The piezoelectric layer has functional portions sandwiched between the first and second electrodes; the second electrode configures a common electrode provided continuously across a plurality of the functional portions; the piezoelectric layer extends to an outer side of an end of the first electrode; the vibration plate has a first region opposing the first electrode, a second region opposing an area of the piezoelectric layer extending further toward an outer side than the first electrode, and a third region further toward the outer side than the piezoelectric layer; the second region has a thickness substantially equal to or greater than the thickness of the first region; and the third region is thinner than the first region.

Claims10

Dependent claims

A liquid ejecting head comprising:

a vibration plate;
and
a piezoelectric element provided on the vibration plate, the piezoelectric element including a first electrode and a second electrode that sandwich a piezoelectric material layer therebetween,
wherein the piezoelectric material layer extends to an outer side of an end portion of the first electrode;
the vibration plate has a first region opposed to the first electrode, and a third region provided further toward the outer side than the piezoelectric material layer;
and
the third region has a thickness that is less than a thickness of the first region.

4 more elements

Dependencies are inferred from the claim text.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

Life of this patent

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

Life of this patent

Abstract

Claims10