Manufacturing method of joined body, manufacturing method of MEMS device, manufacturing method of liquid ejecting head, and manufacturing device of joined body
AssigneeSeiko Epson Corporation
InventorHiroyuki Tsuchiya
Life of this patent
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Abstract
A manufacturing method of a joined body in which a plurality of structures are joined to each other, the method including forming of an adhesive layer on one face of a medium; adjusting of viscosity of the adhesive layer formed in the forming of the adhesive layer; transcribing the adhesive layer of which viscosity is adjusted in the adjusting of viscosity to the structure; and measuring of surface roughness of the adhesive layer on a transcribing film in a stage before the transcribing.
Claims14
A manufacturing method of a joined body in which a plurality of structures are joined to each other using an adhesive in a state of being stacked, the method comprising:
- forming an adhesive layer on one face of a medium;
- adjusting viscosity of the adhesive layer formed in the forming of the adhesive layer;
- transcribing the adhesive layer of which viscosity is adjusted in the adjusting of viscosity to the structure;
- and
- measuring surface roughness of the adhesive layer on the medium in a stage before the transcribing, wherein a surface roughness measuring unit measures the surface roughness and includes (1) a measuring unit which measures the surface roughness of the adhesive layer formed on the medium in a non-contact manner and (2) a support member which supports the medium from a side of a face opposite to a face on which the adhesive layer is formed, when measuring the surface roughness of the adhesive layer, and wherein the support member is disposed at a position in which the medium is pressed toward the measuring unit by a predetermined amount, when measuring at least the surface roughness of the adhesive layer.
A manufacturing device of a joined body in which a plurality of structures are joined to each other using an adhesive in a state of being stacked, the device comprising:
- an adhesive layer forming unit which forms an adhesive layer on one face of a medium;
- a viscosity adjusting unit which adjusts viscosity of the adhesive layer formed by the adhesive layer forming unit;
- a transcribing unit which transcribes the adhesive layer of which viscosity is adjusted by the viscosity adjusting unit to the structure;
- and
- a surface roughness measuring unit which measures surface roughness of the adhesive layer on the medium, wherein:
- the surface roughness measuring unit is disposed in front of the transcribing unit in a manufacturing line,
- the surface roughness measuring unit includes (1) a measuring unit which measures the surface roughness of the adhesive layer formed on the medium in a non-contact manner and (2) a support member which supports the medium from a side of a face opposite to a face on which the adhesive layer is formed, when measuring the surface roughness of the adhesive layer, and
- the support member has a curved face which curves toward the measuring unit.
A manufacturing device of a joined body in which a plurality of structures are joined to each other using an adhesive in a state of being stacked, the device comprising:
- an adhesive layer forming unit which forms an adhesive layer on one face of a medium;
- a viscosity adjusting unit which adjusts viscosity of the adhesive layer formed by the adhesive layer forming unit;
- a transcribing unit which transcribes the adhesive layer of which viscosity is adjusted by the viscosity adjusting unit to the structure;
- and
- a surface roughness measuring unit which measures surface roughness of the adhesive layer on the medium, wherein:
- the surface roughness measuring unit is disposed in front of the transcribing unit in a manufacturing line,
- the surface roughness measuring unit includes (1) a measuring unit which measures the surface roughness of the adhesive layer formed on the medium in a non-contact manner and (2) a support member which supports the medium from a side of a face opposite to a face on which the adhesive layer is formed, when measuring the surface roughness of the adhesive layer, and
- a support member moving mechanism which moves the support member to a position of supporting the medium by being in contact with the medium, and a position of being not in contact with the medium.
A manufacturing device of a joined body in which a plurality of structures are joined to each other using an adhesive in a state of being stacked, the device comprising:
- an adhesive layer forming unit which forms an adhesive layer on one face of a medium;
- a viscosity adjusting unit which adjusts viscosity of the adhesive layer formed by the adhesive layer forming unit;
- a transcribing unit which transcribes the adhesive layer of which viscosity is adjusted by the viscosity adjusting unit to the structure;
- and
- a surface roughness measuring unit which measures surface roughness of the adhesive layer on the medium, wherein:
- the surface roughness measuring unit is disposed in front of the transcribing unit in a manufacturing line,
- the surface roughness measuring unit includes (1) a measuring unit which measures the surface roughness of the adhesive layer formed on the medium in a non-contact manner and (2) a support member which supports the medium from a side of a face opposite to a face on which the adhesive layer is formed, when measuring the surface roughness of the adhesive layer,
- the support member has a curved face which curves toward the measuring unit, and
- the support member is at least a roller member which is rotatably provided in a transport direction of the medium.
Dependencies are inferred from the claim text.