Polishing pad configuration and chemical mechanical polishing system
AssigneeApplied Materials, Inc.
InventorHung Chih Chen
Life of this patent
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Abstract
A polishing pad includes and upper portion and one or more lower portions. The upper portion has an upper surface for attachment to a pad carrier and a first lateral dimension. The one or more lower portions project downward from the upper portion. A bottom surface of the one or more lower portions provide a contact surface to contact a substrate during chemical mechanical polishing. Each lower portion has a second lateral dimension that is less than the first lateral dimension. A total surface area of the contact surface from the one or more lower portions is no more than 10% of a surface area of the upper surface.
Claims4
A chemical mechanical polishing system, comprising:
- a substrate support configured to hold a substrate during a polishing operation;
- a polishing pad support;
- a polishing pad held by the pad support, the polishing pad having an upper portion secured to the polishing pad support and a lower portion projecting downward from a central area of the upper portion, wherein an upper surface of the upper portion abuts the polishing pad support, a bottom surface of the lower portion provides a planar contact surface parallel to a top surface of the substrate to contact the top surface of the substrate across the contact surface during polishing, a perimeter area of the upper portion around the central area being free of a lower portion that contacts the substrate, the contact surface being smaller than the top surface of the substrate, and the upper portion projects laterally past the lower portion on all sides of the lower portion such that the upper portion has a first lateral dimension and the lower portion has a second lateral dimension that is less than the first lateral dimension, wherein a total surface area of the contact surface of the lower portion is no more than 10% of a surface area of the upper surface of the upper portion of the polishing pad.
Dependencies are inferred from the claim text.