Parallel laser manufacturing system and method

A laser-based manufacturing system, comprising:

• a laser source generating a pulsed laser beam;
• a reflectance mirror arranged in a propagation path of the laser to reflect the laser, the mirror being controllable to adjust an emergent angle of the laser;
• a deformable dispersion unit located in a laser receiving path from the reflectance mirror and having an array of micromirrors controllable in response to the adjusted emergent angle to form required laser patterns from the reflected laser, the laser patterns having spatially separated optical spectral components with a plurality of propagation angles;
• one or more focusing units positioned in a propagation path of the separated optical spectral components produced by the deformable dispersion unit, the focusing units recombine the optical spectral components on or inside fabrication targets;
• and
• a DBP System positioned between the laser source and the reflectance mirror to shape pulses of the generated pulsed laser beam, the DBP System comprising:
• a beam diameter regulator located in a beam receiving path and configured to adjust a diameter of the beam received in the beam receiving path;
• a first dispersion unit located in the beam receiving path and separating the spectral components from the adjusted laser to make the separated spectral components transmit out with different emergent angles;
• a first focusing unit located in a beam path from the first dispersion unit and configured to collimate the spectral components of the beam with different emergent angles into a parallel laser beam and to convert the separated spectral components with different emergent angles (angular dispersion) to a plurality of spatially dispersed spectral components at a back focal plane of the first focusing unit;
• a modulating unit positioned on the back focal plane to form arbitrary patterns of the laser from the spatially and spectrally dispersed optical components;
• and
• a second focusing unit located in the beam path and is used to combine different spectral components back to a second dispersion unit positioned at a focal plane of the second focusing unit, wherein the second dispersion unit recombines all the spectral components into a single collimated beam, obtaining a re-shaped pulsed laser beam.