Coating method and coating device
AssigneesBoe Technology Group Co., Ltd., Hefei Boe Optoelectronics Technology Co., Ltd.
InventorYangkun Jing
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Abstract
The present invention provides a coating method for coating an adhesive solution on a substrate to form a film layer. The coating method comprises the following steps: S1, obtaining an initial value of a coating parameter corresponding to a target thickness of the film layer based on at least one functional relation between a thickness of the film layer formed within a predetermined period and at least one coating parameter; S2, starting to coat in accordance with the initial value of the coating parameter obtained in step S1, so that the thickness of the film layer obtained reaches an initial target thickness. Accordingly, the present invention further provides a coating device. According to the present invention, the value of the coating parameter can be determined quickly, thereby coating efficiency can be increased.
Claims6
A coating method for coating an adhesive solution on a substrate to form a film layer, characterized in that, said coating method comprises the following steps:
- S1, obtaining an initial value of one or more coating parameters corresponding to a target thickness of the film layer based on at least one functional relation between a thickness of the film layer formed within a predetermined period and each of said one or more coating parameters;
- S2, starting to coat in accordance with the initial value of said coating parameter obtained in step S1, so that the thickness of the film layer obtained reaches an initial target thickness,
- said coating method further comprises the following steps:
- dividing the substrate into multiple areas arranged in sequence before step S1;
- and then performing said step S1 and said step S2 in a first area in the multiple areas,
- said coating method further comprises the following steps in each of the multiple areas in sequence as arranged, starting from a second area in the multiple areas and proceeding until all of the multiple areas are coated:
- S3, measuring an actual thickness of the film layer in a former area immediately sequentially before a current area;
- S4, obtaining a reference value of each of said one or more coating parameters corresponding to said actual thickness based on each functional relation;
- S5, performing a first correction to each of said one or more coating parameters according to a difference between the reference value and the initial value of each of said one or more coating parameters, thereby obtaining a first correction value of each of said one or more coating parameters;
- S6, coating the adhesive solution on the current area in accordance with the first correction value of each of said one or more coating parameters obtained in S5, and setting the first correction value as the initial value of each of said one or more coating parameters in the next area,
- each of the functional relations can form a function curve, and step S5 includes:
- calculating the first correction value of each coating parameter based on formula (1) and formula (2):
- a
- i
- ′
- =
- a
-
-
- 0
- i
- +
- m
- i
-
- (
- a
-
-
- 0
- i
- -
- a
-
-
- 1
- i
- )
- (
- 1
- )
- m
- i
- =
-
- k
- i
-
- ∑
- j
- =
- 1
- N
-
-
- k
- j
-
- (
- 2
- )
- wherein, ai′ represents the first correction value of No. i coating parameter;
- a0i represents the initial value of No. i coating parameter corresponding to the target thickness of the film layer;
- a1i represents the reference value of No. i coating parameter corresponding to the actual thickness;
- ki represents the tangent slope at the point corresponding to the actual thickness on the function curve of the thickness of the film layer and No. i coating parameter;
- kj represents the tangent slope at the point corresponding to the actual thickness on the function curve of the thickness of the film layer and No. j coating parameter;
- N represents the number of the one or more coating parameters;
- 1≤i≤N, 1≤j≤N, and i and j are both integer.
Dependencies are inferred from the claim text.