Functional device and method of manufacturing the same

A method of manufacturing a functional device, comprising:

• forming a groove on one surface of a first substrate;
• arranging at least one of a capture body which is configured to capture a target substance supplied into the flow path, an electrode which is configured to impart an electrical or a chemical action to the target substance, and a catalyst in a position corresponding to an inner surface of the flow path which is formed of the groove and one surface of a second substrate at the time of bonding the first substrate and the second substrate;
• exposing oxygen plasma and supplying fluorine to at least one of the one surface of the first substrate and the one surface of the second substrate, and adjusting hydrophilic properties of the one surface;
• and
• a step of bonding the one surface of the first substrate and the one surface of the second substrate forming a bonding portion while maintaining a temperature at which the capture body, electrode or catalyst is not thermally damaged,
• the bonding portion between the one surface of the first substrate and the one surface of the second substrate including F—Si bonds where fluorine is bonded to silica included in at least one substrate, and
• the bonding portion between the one surface of the first substrate and the one surface of the second substrate having a fluorine concentration of greater than or equal to 0.6 at % and less than or equal to 3.5 at % wherein each of the first substrate and the second substrate is a glass substrate.