Unimorph-type ultrasound probe and method for manufacturing the same

A method for manufacturing a unimorph-type ultrasound probe, comprising the steps of:

• forming a plurality of piezoelectric element regions in a substrate;
• forming a plurality of openings, each of which has a predetermined shape, in each of the plurality of piezoelectric element regions on the substrate and forming a plurality of vibration plates, each of which closes one end of the plurality of openings in each of the plurality of piezoelectric element regions, on the substrate;
• forming a plurality of piezoelectric element portions in each of the plurality of piezoelectric element regions on a surface of the plurality of vibration plates, the plurality of piezoelectric element portions having a plurality of piezoelectric substance layers, a plurality of first electrode layers disposed on one surfaces of the plurality of piezoelectric substance layers, and a plurality of second electrode layers disposed on the other surfaces of the plurality of piezoelectric substance layers;
• forming a plurality of lead-out electrodes disposed on a surface of the substrate corresponding to the plurality of piezoelectric element regions;
• uniting the plurality of first electrode layers of the plurality of piezoelectric element portions formed in each of the plurality of piezoelectric element regions as one by connecting to each other and connecting the plurality of first electrode layers to a corresponding lead-out electrode;
• and
• forming a covering layer, which is formed of an organic resin having an acoustic impedance of 1.5×106 kg/m2 s to 4×106 kg/m2 s and has a Shore A hardness of equal to or less than 75, on the surface of the substrate such that the plurality of piezoelectric element portions in each of the plurality of piezoelectric element regions are buried under the covering layer.