Through-hole forming method, through-hole forming apparatus, and method of manufacturing glass substrate provided with through-hole
AssigneeAGC Inc.
InventorMotoshi Ono
Life of this patent
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Abstract
Disclosed is a through-hole forming method including a process of forming, by condensing and irradiating a laser beam onto an insulation substrate through a lens, a through-hole that passes through the insulation substrate in a thickness direction of the insulation substrate. A medium between the lens and the insulation substrate is air. A converging half angle θ that is calculated from a focal length f of the lens and a beam diameter d of the laser beam that enters the lens by using expression (1) satisfies expression (2): (d/2)/f=tan θ (1), and 0.16≤sin θ≤0.22 (2).
Claims14
A through hole forming method comprising:
- a process of forming, by condensing and irradiating a laser beam from a carbon dioxide laser onto an insulation substrate through a lens, a through-hole that passes through the insulation substrate in a thickness direction of the insulation substrate,
- wherein a medium between the lens and the insulation substrate is air, and
- wherein a converging half angle θ that is calculated from a focal length f of the lens and a beam diameter d of the laser beam that enters the lens by using expression (1) satisfies expression (2):
- (d/2)/f=tan θ (1), and
- 0.16≤sin δ≤0.22 (2).
The through-hole forming method according to claim
- wherein polarization of the laser beam is converted from linear polarization to circular polarization, and the circularly polarized laser beam is irradiated onto the insulation substrate.
A method of manufacturing a glass substrate provided with a through-hole, the method comprising:
- a process of forming, by condensing and irradiating a laser beam from a carbon dioxide laser onto a glass substrate through a lens, a through-hole that passes through the glass substrate in a thickness direction of the glass substrate,
- wherein a medium between the lens and the glass substrate is air, and
- wherein a converging half angle θ that is calculated from a focal length f of the lens and a beam diameter d of the laser beam that enters the lens by using expression (1) satisfies expression (2):
- (d/2)/f=tan θ (1), and
- 0.16≤sin θ≤0.22 (2).
A through-hole forming method comprising:
- a process of forming, by condensing and irradiating a laser beam from a carbon dioxide laser onto a glass insulation substrate through a lens, a through-hole that passes through the glass insulation substrate in a thickness direction of the glass insulation substrate,
- wherein a medium between the lens and the glass insulation substrate is air, and
- wherein a converging half angle θ that is calculated from a focal length f of the lens and a beam diameter d of the laser beam that enters the lens by using expression (1) satisfies expression (2):
- (d/2)/f=tan θ (1), and
- 0.16≤sin θ≤0.22 (2).
Dependencies are inferred from the claim text.