Corrosion control for chamber components
AssigneeApplied Materials, Inc.
InventorsGovinda Raj, Hanish Kumar, Lin Zhang, Stanley Wu
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Abstract
Implementations described herein protect a chamber components from corrosive cleaning gases used at high temperatures. In one embodiment, a chamber component includes at least a bellows that includes a top mounting flange coupled to a bottom mounting flange by a tubular accordion structure. A coating is disposed on an exterior surface of at least the tubular accordion structure. The coating includes of at least one of polytetrafluoroethylene, parylene C, parylene D, diamond-like carbon (DLC), yttria stabilized zirconia, nickel, alumina, or aluminum silicon magnesium yttrium oxygen compound. In one embodiment, the chamber component is a valve having an internal bellows.
Claims19
A bellows, comprising:
- a top mounting flange;
- a bottom mounting flange;
- a tubular accordion structure coupling the mounting flanges;
- a bonding layer disposed on an exterior treated surface of at least the tubular accordion structure, the bonding layer of at least one of chromium, titanium nitride or titanium;
- and
- a coating disposed on the bonding layer, the coating comprised of at least one of polytetrafluoroethylene (PTFE), parylene C, parylene D, diamond-like carbon, yttria stabilized zirconia, alumina, nickel, or aluminum silicon magnesium yttrium oxygen compound.
A valve assembly, comprising:
- a housing having a valve seat and an interior working volume;
- an actuator coupled to the housing;
- a stem extending into the interior working volume of the housing, the stem coupled to the actuator;
- a valve plug coupled to the stem in the interior working volume of the housing, the valve plug movable by the actuator between positions against and spaced from the valve seat;
- a bellows circumscribing the stem and isolating the stem from the interior working volume of the housing, the bellows having a coating exposed to the interior working volume of the housing;
- and
- a bonding layer disposed between the coating and the bellows.
Dependencies are inferred from the claim text.