Plasma-chemical coating apparatus

A plasma-chemical coating apparatus comprising:

• a plasma chamber having at least one linear antenna arranged therein so as to produce a plasma by electromagnetic power,
• a carrier gas supply terminating in said plasma chamber and supplying a carrier gas thereto, and
• said plasma chamber having a plasma exit opening in a direction of a treatment chamber configured to provide a plasma-assisted modification of a substrate,
• wherein the plasma exit opening is a narrowing that is defined by at least one cylinder supported for rotation about a cylinder axis thereof so that said narrowing extends lengthwise of said cylinder, and
• wherein the apparatus has a cleaning zone into which an area of an outer surface of the cylinder is introduced by rotation about the cylinder axis and cleaned in said cleaning zone, and
• wherein the apparatus further comprises a layer gas supply supplying a layer gas in an area distal to the narrowing, and
• wherein the cylinder is a hollow cylinder and comprises a nozzle which serves as the layer gas supply.

A plasma-chemical coating apparatus comprising:

• a plasma chamber having at least one linear antenna arranged therein so as to produce a plasma by electromagnetic power,
• a carrier gas supply terminating in said plasma chamber and supplying a carrier gas thereto, and
• said plasma chamber having a plasma exit opening in a direction of a treatment chamber configured to provide a plasma-assisted modification of a substrate,
• wherein the plasma exit opening is a narrowing that is defined by at least one cylinder supported for rotation about a cylinder axis thereof so that said narrowing extends lengthwise of said cylinder, and
• wherein the apparatus has a cleaning zone into which an area of an outer surface of the cylinder is introduced by rotation about the cylinder axis and cleaned in said cleaning zone, and
• wherein a second linear antenna is arranged in parallel with the first linear antenna and the two linear antennae generate plasma with electromagnetic power.