Microstructured surface with low work function
AssigneeElwha LLC
InventorsRoderick A. Hyde, Jordin T. Kare, Tony S. Pan, Lowell L. Wood, Jr.
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Abstract
A horizontal multilayer junction-edge field emitter includes a plurality of vertically-stacked multilayer structures separated by isolation layers. Each multilayer structure is configured to produce a 2-dimensional electron gas at a junction between two layers within the structure. The emitter also includes an exposed surface intersecting the 2-dimensional electron gas of each of the plurality of vertically-stacked multilayer structures to form a plurality of effectively one-dimensional horizontal line sources of electron emission.
Claims20
A multilayer junction-edge emitter structure, comprising:
- a substrate;
- a first layer on the substrate, wherein the first layer includes a first semiconductor;
- a second layer on the first layer, wherein the second layer includes one of a second semiconductor different from the first semiconductor, an oxide, or a metal, wherein the first layer and the second layer are configured to form a 2-dimensional electron gas (2DEG) at a junction of the first layer and the second layer;
- and
- an exposed surface intersecting the 2DEG to form an effectively one-dimensional horizontal line source of electron emission.
A method of fabricating a multilayer junction-edge emitter structure, comprising:
- providing a substrate;
- stacking a first layer on the substrate, wherein the first layer includes a first semiconductor;
- stacking a second layer on the first layer, wherein the second layer includes one of a second semiconductor different from the first semiconductor, an oxide, or a metal, wherein the first layer and the second layer are configured to form a 2-dimensional electron gas (2DEG) at a junction of the first layer and the second layer;
- and
- exposing an exposed surface intersecting the 2DEG to form an effectively one-dimensional horizontal line source of electron emission.
Dependencies are inferred from the claim text.