Ink composition for plasma processing detection, and indicator for plasma processing detection using said ink composition

Abstract

The present invention provides an ink composition for forming a color-changing layer that changes color by plasma treatment, the ink composition exhibiting excellent heat resistance, with the gasification of the color-changing layer or the scattering of the fine debris of the color-changing layer caused by plasma treatment being suppressed to the extent that electronic device properties are not affected. The invention provides an ink composition for forming a color-changing layer that changes color by plasma treatment, the ink composition comprising metal oxide particles containing at least one element selected from the group consisting of Mo, W, Sn, V, Ce, Te, and Bi, and a binder resin.

Dependencies are inferred from the claim text.