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US 10,168,261 B2Granted
Structure for achieving dimensional stability during temperature changes
AssigneeKLA-Tencor Corporation
InventorsWarren Oliver, Sudharshan Phani Pardhasaradhi, Richard Anthony
Life of this patent
Estimating the term…
Abstract
A heated or cooled sample holding stage for use in a nanoindentation measurement system is described. The geometry of the design and the selection of materials minimizes movement of a sample holder with respect to a nanoindentation tip over a wide range of temperatures. The system controls and minimizes motion of the sample holder due to the heating or cooling of the tip holder and/or the sample holder in a high temperature nanoindentation system. This is achieved by a combination of geometry, material selection and multiple sources and sinks of heat. The system is designed to control both the steady state and the transient displacement response.
Claims17
A sample holding stage for a measurement instrument, the sample holding stage comprising:
- a sample holder comprising:
- a sample platform having an upper surface upon which a sample may be placed and a lower surface disposed below the upper surface;
- and
- a tubular support stem having a stem upper portion that is rigidly affixed to the lower surface of the sample platform and a stem lower portion disposed below the stem upper portion;
- a support structure comprising:
- a base member that is rigidly affixed to the stem lower portion;
- a tubular wall member having a wall lower portion that is rigidly affixed to the base member and a wall upper portion disposed above the wall lower portion;
- and
- a lip member affixed to the tubular wall member, the lip member having a central opening;
- and
- a housing comprising:
- a central bore into which are received the base member and the tubular wall member of the support structure;
- and
- an upper ledge at least partially surrounding an upper portion of the central bore,
- wherein the lip member of the support structure is rigidly affixed to the upper ledge of the housing,
- wherein the tubular support stem of the sample holder is disposed inside the tubular wall member of the support structure,
- wherein at least a portion of the sample platform of the sample holder is disposed inside the central opening of the lip member of the support structure,
- wherein the sample platform can move axially with respect to the tubular wall member of the support structure due to thermal expansion or contraction,
- wherein the base member of the support structure can move axially with respect to the housing due to thermal expansion or contraction, and
- wherein the net axial displacement of the upper surface of the sample platform with respect to the upper ledge of the housing due to thermal expansion or contraction is no greater than 10 nanometers per degree change in temperature over a range of 25° C. to 1000° C.
17 more elements
An indentation tip holding stage for a measurement instrument, the indentation tip holding stage comprising:
- a housing comprising:
- a housing outer surface;
- and
- a housing central bore extending into the housing from the housing outer surface;
- a support structure comprising:
- a central portion disposed at least partially inside the housing central bore;
- a central portion outer surface disposed outside the housing central bore;
- a support structure central bore extending into the central portion from the central portion outer surface, the support structure central bore having:
- a central portion bore opening in the central portion outer surface;
- and
- a central portion bore end spaced apart from the bore opening;
- and
- a lip member extending outwardly from the central portion and rigidly affixed to the housing outer surface;
- and
- a tip holder disposed at least partially inside the support structure central bore, the lip holder comprising:
- a receiving portion disposed adjacent the central portion bore opening, the receiving portion for receiving and holding an indentation tip;
- and
- an attachment portion disposed inside the support structure central bore and being rigidly affixed to the central portion or the support structure adjacent the central portion bore end;
- wherein the central portion or the support structure can move axially within the housing central bore due to thermal expansion or contraction, and
- wherein the receiving portion of the lip holder can move axially within the support structure central bore due to thermal expansion or contraction.
17 more elements
A sample holding stage for a measurement instrument, the sample holding stage comprising:
- a sample holder formed of molybdenum comprising:
- a sample platform having an upper surface upon which a sample may be placed and a lower surface disposed below the upper surface;
- and
- a tubular support stem having a stem upper portion that is rigidly affixed to the lower surface of the sample platform and a stem lower portion disposed below the stem upper portion;
- a support structure comprising:
- a base member that is rigidly affixed to the stem lower portion;
- a tubular wall member having a wall lower portion that is rigidly affixed to the base member and a wall upper portion disposed above the wall lower portion;
- and
- a lip member affixed to the tubular wall member, the lip member having a central opening;
- and
- a housing comprising:
- a central bore into which are received the base member and the tubular wall member of the support structure;
- and
- an upper ledge at least partially surrounding an upper portion of the central bore,
- wherein the lip member of the support structure is rigidly affixed to the upper ledge of the housing,
- wherein the tubular support stem of the sample holder is disposed inside the tubular wall member of the support structure,
- wherein at least a portion of the sample platform of the sample holder is disposed inside the central opening of the lip member of the support structure,
- wherein the sample platform can move axially with respect to the tubular wall member of the support structure due to thermal expansion or contraction, and
- wherein the base member of the support structure can move axially with respect to the housing due to thermal expansion or contraction.
16 more elements
A sample holding stage for a measurement instrument, the sample holding stage comprising:
- a sample holder comprising:
- a sample platform having an upper surface upon which a sample may be placed and a lower surface disposed below the upper surface;
- and
- a tubular support stem having a stem upper portion that is rigidly affixed to the lower surface of the sample platform and a stem lower portion disposed below the stem upper portion;
- a support structure formed of stainless steel comprising:
- a base member that is rigidly affixed to the stem lower portion;
- a tubular wall member having a wall lower portion that is rigidly affixed to the base member and a wall upper portion disposed above the wall lower portion;
- and
- a lip member affixed to the tubular wall member, the lip member having a central opening;
- and
- a housing comprising:
- a central bore into which are received the base member and the tubular wall member of the support structure;
- and
- an upper ledge at least partially surrounding an upper portion of the central bore, wherein the lip member of the support structure is rigidly affixed to the upper ledge of the housing,
- wherein the tubular support stem of the sample holder is disposed inside the tubular wall member of the support structure,
- wherein at least a portion of the sample platform of the sample holder is disposed inside the central opening of the lip member of the support structure,
- wherein the sample platform can move axially with respect to the tubular wall member of the support structure due to thermal expansion or contraction, and
- wherein the base member of the support structure can move axially with respect to the housing due to thermal expansion or contraction.
15 more elements
A sample holding stage for a measurement instrument, the sample holding stage comprising:
- a sample holder comprising:
- a sample platform having an upper surface upon which a sample may be placed and a lower surface disposed below the upper surface;
- and
- a tubular support stem having a stem upper portion that is rigidly affixed to the lower surface of the sample platform and a stem lower portion disposed below the stem upper portion;
- a support structure comprising:
- a base member that is rigidly affixed to the stem lower portion;
- a tubular wall member having a wall lower portion that is rigidly affixed to the base member and a wall upper portion disposed above the wall lower portion;
- and
- a lip member affixed to the tubular wall member, the lip member having a central opening;
- and
- a housing formed of copper comprising:
- a central bore into which are received the base member and the tubular wall member of the support structure;
- and
- an upper ledge at least partially surrounding an upper portion of the central bore, wherein the lip member of the support structure is rigidly affixed to the upper ledge of the housing,
- wherein the tubular support stem of the sample holder is disposed inside the tubular wall member of the support structure,
- wherein at least a portion of the sample platform of the sample holder is disposed inside the central opening of the lip member of the support structure,
- wherein the sample platform can move axially with respect to the tubular wall member of the support structure due to thermal expansion or contraction, and
- wherein the base member of the support structure can move axially with respect to the housing due to thermal expansion or contraction.
15 more elements
A sample holding stage for a measurement instrument, the sample holding stage comprising:
- a sample holder comprising:
- a sample platform that is cylindrical and has an upper surface upon which a sample may be placed and a lower surface disposed below the upper surface, the sample platform having a sample platform diameter that is larger than or equal to the sample diameter so as to accommodate the sample;
- and
- a tubular support stem having a stem upper portion that is rigidly affixed to the lower surface of the sample platform and a stem lower portion disposed below the stem upper portion;
- a support structure comprising:
- a base member that is rigidly affixed to the stem lower portion;
- a tubular wall member that is cylindrical and has a wall lower portion that is rigidly affixed to the base member and a wall upper portion disposed above the wall lower portion, the tubular wall member having an inner tubular wall diameter that is greater than the sample platform diameter, such that the sample platform can move axially with respect to the tubular wall member;
- and
- a lip member affixed to the tubular wall member, the lip member having a central opening that is cylindrical, and having a central opening inner diameter that is greater than the sample platform diameter, such that the sample platform can move axially with respect to the central opening of the lip member;
- and
- a housing comprising:
- a central bore into which are received the base member and the tubular wall member of the support structure, the central bore being cylindrical and having a central bore diameter that is greater than an outer tubular wall diameter of the tubular wall member, such that the tubular wall member can move axially with respect to the central bore of the housing;
- and
- an upper ledge at least partially surrounding an upper portion of the central bore, wherein the lip member of the support structure is rigidly affixed to the upper ledge of the housing,
- wherein the tubular support stem of the sample holder is disposed inside the tubular wall member of the support structure,
- wherein at least a portion of the sample platform of the sample holder is disposed inside the central opening of the lip member of the support structure,
- wherein the sample platform can move axially with respect to the tubular wall member of the support structure due to thermal expansion or contraction, and
- wherein the base member of the support structure can move axially with respect to the housing due to thermal expansion or contraction.
15 more elements
Dependencies are inferred from the claim text.