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US 10,168,239 B2Granted
Gas sensing devices, systems, and associated methods
AssigneeIntel Corporation
InventorKadhair Al-Hemyari
Life of this patent
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Abstract
A gas sensing device is provided including an enclosure having an internal chamber operable to receive and contain at least one test gas, a photonic heat source positioned to deliver photonic energy into the internal chamber, and a pressure sensor functionally coupled to the internal chamber and operable to detect a pressure change within the internal chamber.
Claims23
A gas sensing device, comprising:
- an enclosure having an internal chamber operable to receive and contain at least one test gas;
- a photonic heat source positioned to deliver wavelength or frequency modulated photonic energy into the internal chamber to create gas pressure modulations within the internal chamber by selectively stimulating an analyte in the test gas;
- a pressure sensor monolithically fabricated on a substrate, the pressure sensor functionally coupled to the internal chamber and operable to detect the gas pressure modulations within the internal chamber;
- at least one pump monolithically fabricated on the substrate, the at least one pump functionally coupled to the enclosure and operable to deliver the at least one test gas into the internal chamber;
- an inlet channel monolithically fabricated on the substrate;
- a deflection membrane monolithically fabricated on the substrate;
- and
- the at least one pump including a displacement structure monolithically fabricated on the substrate to unidirectionally draw the at least one gas past the deflection membrane through the inlet channel and into the internal chamber.
5 more elements
Dependencies are inferred from the claim text.