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AssigneeBoard of Regents, The University of Texas System
InventorsC. Grant Wilson, William J. Durand, Christopher John Ellison, Christopher M. Bates, Takehiro Seshimo, Julia Cushen, Logan J. Santos, Leon Dean, Erica L. Rausch
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Vacuum deposited thin films of material are used to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nano structured features in a block copolymer film that can serve as lithographic patterns.
A layered structure comprising first, second and third layers on a surface, wherein said first layer comprises a surface energy neutralizing layer, wherein said second layer comprises a block copolymer film, wherein said block copolymer comprises a triblock copolymer, and wherein said third layer comprises a poly(p-xylylene) polymer.
A layered structure comprising first, second and third layers on a surface, wherein said first layer comprises a surface energy neutralizing layer, wherein said second layer comprises a block copolymer film, and wherein said third layer comprises a poly(p-xylylene) polymer, wherein said surface energy neutralizing layer comprises a polymer selected from the group consisting of:
A layered structure comprising first, second and third layers on a surface, wherein said first layer comprises a surface energy neutralizing layer, wherein said second layer comprises a block copolymer film wherein said block copolymer is made from at least two monomers, wherein at least one of the monomers is methacryloxymethyltrimethylsilane, and wherein said third layer comprises a poly(p-xylylene) polymer.
Dependencies are inferred from the claim text.