Alignment pattern for package singulation
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYing-Ju Chen, Der-Chyang Yeh, Hsien-Wei Chen, Shih-Peng Tai
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYing-Ju Chen, Der-Chyang Yeh, Hsien-Wei Chen, Shih-Peng Tai
Estimating the term…
A method includes forming an alignment pattern over an insulating layer formed over a carrier. A die is mounted over the carrier and encapsulated. Connectors are formed and the structure is attached to a debond tape. The carrier is removed. A cutting device is aligned to a backside of the insulating layer using the alignment pattern. The first insulating layer and encapsulant are cut from the backside of the insulating layer. Another method includes scanning a backside of a packages structure for an alignment pattern in a first package area of the packages structure. A cutting device is aligned to a cut-line in a non-package area of the packages structure based on the alignment pattern and packages are singulated. An InFO package includes an insulating layer on the backside, the insulating layer having a laser marking thereon. The InFO package also includes an alignment pattern proximate to the insulating layer.
A method, comprising:
A method, comprising:
A integrated fan-out (InFO) package comprising:
Dependencies are inferred from the claim text.