Back to results
US 10,163,668 B2Granted
Thermal dynamic response sensing systems for heaters
AssigneeWatlow Electric Manufacturing Company
InventorLouis P. Steinhauser
Life of this patent
Estimating the term…
Abstract
A heater system includes a heater assembly, an imaging device and a control system. The heater assembly includes a plurality of heating zones. The imaging device acquires an image of the heater assembly. The control system determines variations in the plurality of heating zones based on the thermal image.
Claims19
A heater system comprising:
- a heater assembly including a heating surface for heating a heating target, the heating surface defining a plurality of heating zones;
- an imaging device that acquires a thermal image of the heating surface of the heater assembly;
- and
- a control system that determines variations in the plurality of heating zones based on the thermal image of the heating surface, wherein the thermal image includes a plurality of pixels corresponding to the plurality of heating zones in the heater assembly.
1 more element
A heater system comprising:
- a heater assembly having a heating surface and a plurality of heating elements for heating a heating target;
- a controller that is configured to provide stimulus, causing a disturbance to a predetermined temperature of the heating surface of the heater assembly;
- and
- a control system configured to be in electrical communication with the controller to receive stimulus information from the controller and to control the heater assembly to maintain predetermined temperature profile on the heating surface of the heater assembly based on the stimulus information from the controller.
1 more element
A heater system comprising:
- a processing chamber defining an interior wall;
- a heater assembly disposed on the interior wall and the heater assembly defining a heating surface including a plurality of heating zones and a plurality of heating elements, the heating surface defining an interior surface of the processing chamber;
- and
- a control system configured to be in electrical communication with the heater assembly for monitoring a temperature distribution of the heating surface, wherein the control system by monitoring the electrical resistance of the heating elements determines the temperature distribution of the plurality of heating zones.
1 more element
Dependencies are inferred from the claim text.