Probe assembly with high bandwidth beam
AssigneeIntel Corporation
InventorsAmir Raveh, Travis Eiles, Evgeny Gregory Nisenboim, Patrick Pardy
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Abstract
A probe assembly for analyzing a test device that includes a housing with an electron source disposed therein for emitting primary electrons. A photon source is positioned to emit photons that strike the electron source such that when the photons strike the electron source, the electron source emits the primary electrons. Detection circuitry is provided that is configured to detect secondary electrons emitted from a test device of a test assembly and to form an excitation waveform.
Claims25
A probe assembly for analyzing a test device comprising:
- a housing including an electron source disposed therein for emitting primary electrons;
- a photon source positioned to emit photons that strike the electron source such that when the photons strike the electron source, the electron source emits the primary electrons;
- and
- detection circuitry configured to detect secondary electrons emitted from a test device of a test assembly and to form an excitation waveform.
A method for forming an excitation voltage waveform of a test device comprising:
- providing an electron source that emits primary electrons when above a threshold voltage;
- directing photons on the electron source to increase voltage at the electron source above the threshold voltage to emit primary electrons that strike the test device;
- detecting secondary electrons emitted by the test device after the primary electrons strike the test device;
- and
- forming the excitation voltage waveform based on the detected secondary electrons.
Dependencies are inferred from the claim text.