Electron multiplier for MEMs light detection device
AssigneeEagle Technology, LLC
InventorsArlynn W. Smith, Dan Chilcott
Life of this patent
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Abstract
An electron multiplier for a Micro-Electro-Mechanical-Systems (MEMS) image intensifier includes an input surface, an emission surface, a plurality of doped ribs, and a plurality of textured surfaces. The input surface receives electrons and the emission surface is opposite the input surface. The plurality of doped ribs extends at least partially between the input surface and the emission surface to form a plurality of pixels. The plurality of textured surfaces are disposed in the plurality of pixels.
Claims20
An electron multiplier apparatus comprising:
- an input surface for receiving electrons;
- an emission surface opposite the input surface;
- a plurality of doped ribs extending at least partially between the input surface and the emission surface to form a plurality of pixels;
- and
- a plurality of textured surfaces disposed in the plurality of pixels.
A method of forming an electron multiplier for a Micro-Electro-Mechanical-Systems (MEMS) image intensifier, comprising:
- creating a plurality of pixels between a plurality of ribs that extend at least partially between an input surface and an emission surface of a substrate;
- and
- creating a plurality of textured surfaces in the plurality of pixels.
An electron sensing device comprising:
- a cathode for providing a source of electrons;
- and
- an anode for receiving electrons emitted from the cathode, the anode including a plurality of textured surfaces disposed between doped ribs that extend at least partially through the anode and define a plurality of pixels.
Dependencies are inferred from the claim text.