Microelectromechanical gas sensor based on knudsen thermal force

A microelectromechanical (MEMS) gas sensor operating based on Knudsen thermal force, comprising:

• a substrate;
• at least one stationary assembly fixedly coupled to the substrate, the at least one stationary assembly terminating at corresponding pads configured to receive an electrical current for heating the at least one stationary assembly;
• at least one moveable assembly disposed above the substrate and biased to move substantially according to a main axis and juxtaposed with the at least one stationary assembly,
• the at least one moveable assembly configured to be selectively moveable with respect to the at least one stationary assembly such that at a known pressure applied to the at least one stationary assembly in the heated state and the at least one moveable assembly, movement of the at least one moveable assembly correlated to identity of concentration of known constituents of gases applying the known pressure;
• the at least one stationary assembly comprising
• a base portion;
• and
• at least one heating arm extended outward from the base portion;
• the at least one moveable assembly comprising
• a base portion;
• and
• at least one sensing arm extended from the base portion, the at least one extended sensing arm juxtaposed with a corresponding heating arm;
• an actuation mechanism coupled to an actuation end of the at least one moveable assembly and configured to cause the selective movement;
• and
• a sensing mechanism coupled to a sensing end of the at least one moveable assembly opposite the actuation end, the sensing mechanism configured to sense the active movement of the at least one moveable assembly.

A system operating based on Knudsen thermal force, comprising:

• a microelectromechanical (MEMS) gas sensor, comprising
• a substrate,
• at least one stationary assembly fixedly coupled to the substrate, the at least one stationary assembly terminating at corresponding pads configured to receive an electrical current for heating the at least one stationary assembly,
• at least one moveable assembly disposed above the substrate and biased to move substantially according to a main axis and juxtaposed with the at least one stationary assembly,
• the at least one moveable assembly configured to be selectively moveable along the main axis with respect to the at least one stationary assembly such that pressure applied to the at least one stationary assembly in the heated state and the at least one moveable assembly forms Knudsen forces applied to the at least one moveable assembly causing active movement of the at least one moveable assembly substantially along the main axis;
• an actuation mechanism coupled to an actuation end of the at least one moveable assembly and configured to cause the selective movement;
• and
• a sensing mechanism coupled to a sensing end of the at least one moveable assembly opposite the actuation end, the sensing mechanism configured to sense the active movement of the at least one moveable assembly.