Fluid deposition appartus and method

A micro-fluidic probe card, comprising:

• a fluid inlet comprising a first conduit extending between a first surface of a micro-fluidic probe card and a second surface of the micro-fluidic probe card, wherein the fluid inlet is configured to provide a fluidic chemical from a processing tool to an exposure chamber on the second surface of the micro-fluidic probe card;
• a fluid outlet comprising a second conduit extending between the first surface and the second surface, wherein the fluid outlet is configured to remove the fluidic chemical from the exposure chamber;
• a sealant element configured to contact a substrate having one or more biosensors, wherein the sealant element is connected to the second surface of the micro-fluidic probe card at a position that forms sidewalls of the exposure chamber;
• wherein the fluid inlet and the fluid outlet are defined by sidewalls of the micro-fluidic probe card, which are coupled between the first surface and the second surface;
• a performance monitoring element configured to perform an in-situ monitoring process to determine if the fluidic chemical has been applied to the substrate in contact with the exposure chamber;
• wherein the micro-fluidic probe card comprises a transparent surface positioned between the performance monitoring element and the substrate;
• and
• wherein the performance monitoring element comprises a light source configured to provide a light to the fluidic chemical, and a fluorescence monitor is configured to measure a fluorescence response of the fluidic chemical.

A micro-fluidic probe card, comprising:

• a probe card body having a first side and a second side;
• a sealant element connected to the second side of the probe card body in a manner that forms a cavity within a hollow interior of the sealant element, wherein the cavity is configured to contact a substrate comprising one or more bio-sensors;
• a fluid inlet comprising a first conduit extending between the first side and the second side, wherein the fluid inlet is configured to provide a fluid from a processing tool to the cavity;
• a fluid outlet comprising a second conduit extending between the first side and the second side, wherein the fluid outlet is configured to remove the fluid from the cavity;
• and
• a chemical recycling element configured to receive the fluid removed from the cavity via the fluid outlet and to provide the removed fluid to the cavity via the fluid inlet.