Metal grating for X-rays, production method for metal grating for X-rays, metal grating unit for X-rays, and X-ray imaging device
AssigneeKonica Minolta, Inc.
InventorMitsuru Yokoyama
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AssigneeKonica Minolta, Inc.
InventorMitsuru Yokoyama
Estimating the term…
An X-ray metal grating structure of the present invention has a grating region in which a plurality of first structural portions are periodically provided, wherein an air gap is formed between each of the plurality of first structural portions and a second structural portion as a remaining part of the grating region other than the plurality of first structural portions. Thus, the X-ray metal grating structure of the present invention is formed as a grating structure having high flatness. A production method therefor comprises a step of forming the air gap between the first structural portion and the second structural portion. Thus, the production method makes it possible to produce an X-ray metal grating structure having high flatness. The present invention further provides an X-ray metal grating unit and an X-ray imaging device each comprising the X-ray metal grating structure.
An X-ray metal grating structure comprising a grating-forming workpiece having one surface formed with a grating region in which a plurality of first structural portions are provided,
An X-ray metal grating structure production method comprising:
Dependencies are inferred from the claim text.