US 10,151,713 B2 · X-ray reflectometry apparatus for samples with a miniscule measurement area and a thickness in nanometers and method thereof

Abstract

This application relates to an apparatus and methods for enhancing the performance of X-ray reflectometry (XRR) when used in characterizing thin films and nanostructures supported on a flat substrate. In particular, this application is targeted for addressing the difficulties encountered when XRR is applied to samples with very limited sampling volume, i.e. a combination of small sampling area and miniscule sample thickness or structure height. Point focused X-ray with long wavelength, greater than that from a copper anode or 0.154 nm, is preferably used with appropriately controlled collimations on both incident and detection arms to enable the XRR measurements of samples with limited volumes.

Claims18

Dependent claims

An X-ray reflectometry (XRR) apparatus, comprising:

an X-ray source for emitting an X-ray with a wavelength larger than 0.154 nanometers (nm);
an X-ray reflector for point focusing the X-ray onto a surface of a sample;
a set of incident slits between the X-ray reflector and the sample, for adjusting an incident angle opening of the X-ray;
an X-ray detector for collecting the X-ray reflected by the surface of the sample;
and
a set of detector slits between the X-ray detector and the sample, for controlling a detecting angle opening;
wherein the X-ray is point focused by the X-ray reflector onto the surface with an incident angle adjustable over a preset range.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

15/161,046Filed 20 May 2016

Published

US 2016/0341674 A124 Nov 2016

Granted

11 Dec 2018

Term ends

Not estimatedThe source records don’t support an estimate.

Classification5 codes

G01N 23/20
Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 –…: by…
G01B 15/08
Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma…
G01B 2210/56
Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors: measuring geometric parameters of…
G01N
Investigating or analysing materials by determining their chemical or physical properties

X-ray reflectometry apparatus for samples with a miniscule measurement area and a thickness in nanometers and method thereof

Life of this patent

X-ray reflectometry apparatus for samples with a miniscule measurement area and a thickness in nanometers and method thereof

Life of this patent

Abstract

Claims18