Micro pick up array pivot mount
AssigneeApple Inc.
InventorsStephen P. Bathurst, Paul Argus Parks, Nile Alexander Light
Life of this patent
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Abstract
Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes a plurality of spring arms, with each spring arm including a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm are immediately adjacent the switch-back and are parallel to each other. A first strain sensing element is located at the first length, and a second strain sensing element is located at the second length.
Claims15
A pivot mount comprising:
- a pivot platform;
- a base;
- a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root;
- wherein each spring arm includes a switch-back along an axial length of said each spring arm such that a pair of first and second lengths of said each spring arm immediately adjacent the switch-back are parallel to each other.
Dependencies are inferred from the claim text.