Back to results
US 10,145,806 B2Granted
X-ray apparatus
AssigneeNikon Corporation
InventorToshihisa Tanaka
Life of this patent
Estimating the term…
Abstract
An X-ray apparatus includes: an X-ray source that radiates X-rays upon an object to be measured; a frame upon which the X-ray source is mounted; an anti-vibration mechanism that attenuates vibration applied to the frame; and a shift mechanism that shifts the frame and the anti-vibration mechanism integrally together.
Claims9
An X-ray apparatus, comprising:
- an X-ray source that radiates X-rays upon an object to be measured;
- a frame upon which the X-ray attenuates vibration applied to the frame;
- a base plate unit that supports a shift mechanism;
- and
- the shift mechanism that shifts the frame and the anti-vibration mechanism integrally together.
2 more elements
Dependencies are inferred from the claim text.